Wafer Handing Pads
Wafer Handling Pads are designed to provide secure, non-contaminating contact during wafer transport and handling processes. Manufactured from high-performance elastomer materials, they offer excellent wear resistance, dimensional stability, and low particle generation to protect delicate wafers from damage and contamination.
Engineered for semiconductor manufacturing environments, these pads ensure reliable wafer positioning, gentle handling, and long service life across a wide range of automated handling systems.
Key Benefits:
- Low particle generation for cleanroom applications
- Excellent wear and abrasion resistance
- Gentle wafer contact to prevent scratching
- High dimensional stability and durability
- Chemical and temperature resistance
- Consistent performance in automated handling systems
- Available in custom sizes, shapes, and materials
Applications:
Wafer Robots, End Effectors, Wafer Chucks, Transfer Arms, Load Ports, FOUP Systems, and Semiconductor Handling Equipment.