Bonded Slit Valve Door
The Bonded Slit Valve Door features a high-performance FFKM seal permanently bonded to an aluminum or stainless steel door. This integrated design eliminates seal movement, reduces particle generation, and delivers superior sealing reliability in critical semiconductor processes.
Compared to conventional O-ring designs, the bonded assembly simplifies maintenance, minimizes installation errors, and significantly extends service life.
Key Benefits:
- Reduced particle generation and contamination
- Improved vacuum sealing performance
- Eliminates seal movement and wear
- Simplified installation and maintenance
- Reduced downtime and maintenance costs
- Extended service life—up to 10× longer than conventional O-rings
- Excellent chemical and plasma resistance
Applications:
Etch, CVD, PVD, ALD, Load Lock, Transfer Chamber, and other semiconductor vacuum systems.