Semiconductor Sealing Solutions OEM Custom Services

・We specialize in providing high-precision, high-cleanliness sealing solutions for semiconductor equipment manufacturers (OEMs) and their supporting supply chains.
・Through rigorous material selection, process control, and application verification, our sealing products ensure long-term stable operation in extreme environments, meeting customers' diverse needs under vacuum, plasma, corrosion, and high-temperature conditions.


Cooperative Advantages:

① One stop OEM customization service (design mold manufacturing testing)
② ISO9001, IATF16949, RoHS, REACH, FDA and other certifications are complete
③ Fast sample and batch delivery capability
④ Confidentiality Agreement (NDA) can be signed to protect customers' intellectual property rights

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Customized Service Process

Requirements Analysis

Assess sealing requirements based on customer equipment structure, medium environment, and operating parameters

Material Selection

Provide a variety of material options such as NBR, EPDM, FKM, FFKM, PTFE, etc

Structural Design

Customize cross-sectional dimensions and shapes based on sealing locations such as E-chuck, Gate Valve, Slit Valve, etc

Mold Development

Our own mold center allows for quick mold making and sampling (delivery time as short as 7 days)

Sample Verification

Through plasma resistance, corrosion resistance, vacuum leak testing, and lifespan testing

Mass Production

Automated production+Class 100/Class 1000 cleanroom processing

Technical Support

Provide installation guidance, failure analysis, and improvement suggestions

Technical Capability Advantage

Material research and development capability

Capable of self formulation and mixing, it can develop specialized compounds for process environments such as Plasma, CVD, ALD, Etching, CMP, etc.

High cleanliness manufacturing system

Having a clean production environment of 3500 square meters at the thousand/hundred level, ensuring low particle and low volatility.

Precision machining capability

Support high-precision customization of small-sized O-Ring, Bonded Seal, Door Seal, Centering Ring, and more.

Full performance verification

Full coverage of leakage rate, compression permanent deformation, corrosion resistance, and plasma durability testing.

Compatible with multiple brands of devices

Compatible with mainstream equipment such as Applied Materials, LAM, TEL, ASML, KLA, ASM, Oxford Instruments, etc.

Customizable Product Range

Product TypeApplication DevicesMaterial OptionsRemark
O-RingChamber, electrostatic suction cup, gas path sealFFKM / FKM / EPDM / PTFEHigh vacuum, high temperature
Door SealGate Valve / Slit ValveFFKM / SiliconeAdhesive structure, plasma resistance
Bonded Seal Vacuum door, valve body sealingFFKM / FKMParticle proof, long lifespan
Centering RingVacuum connectorsNBR / FKM / PTFECompliant with ISO-KF/CF standards
Custom Gasket CVD / Etch / PVD equipmentFFKM / PTFE / PFACustomizable according to the image

Typical application scenarios

Wafer Handling Systems

Vacuum Chamber / Valve Systems

Etching / CVD / ALD

Lithography / Cleaning Systems

Metrology & Inspection Systems

ONLINE MESSAGE

We will contact you within one working day. Please pay attention to your email.

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