Semiconductor Sealing Solutions OEM Custom Services
・We specialize in providing high-precision, high-cleanliness sealing solutions for semiconductor equipment manufacturers (OEMs) and their supporting supply chains.
・Through rigorous material selection, process control, and application verification, our sealing products ensure long-term stable operation in extreme environments, meeting customers' diverse needs under vacuum, plasma, corrosion, and high-temperature conditions.
Cooperative Advantages:
① One stop OEM customization service (design mold manufacturing testing)
② ISO9001, IATF16949, RoHS, REACH, FDA and other certifications are complete
③ Fast sample and batch delivery capability
④ Confidentiality Agreement (NDA) can be signed to protect customers' intellectual property rights
Customized Service Process
Technical Capability Advantage
Material research and development capability
Capable of self formulation and mixing, it can develop specialized compounds for process environments such as Plasma, CVD, ALD, Etching, CMP, etc.
High cleanliness manufacturing system
Having a clean production environment of 3500 square meters at the thousand/hundred level, ensuring low particle and low volatility.
Precision machining capability
Support high-precision customization of small-sized O-Ring, Bonded Seal, Door Seal, Centering Ring, and more.
Full performance verification
Full coverage of leakage rate, compression permanent deformation, corrosion resistance, and plasma durability testing.
Compatible with multiple brands of devices
Compatible with mainstream equipment such as Applied Materials, LAM, TEL, ASML, KLA, ASM, Oxford Instruments, etc.
Customizable Product Range
| Product Type | Application Devices | Material Options | Remark |
| O-Ring | Chamber, electrostatic suction cup, gas path seal | FFKM / FKM / EPDM / PTFE | High vacuum, high temperature |
| Door Seal | Gate Valve / Slit Valve | FFKM / Silicone | Adhesive structure, plasma resistance |
| Bonded Seal | Vacuum door, valve body sealing | FFKM / FKM | Particle proof, long lifespan |
| Centering Ring | Vacuum connectors | NBR / FKM / PTFE | Compliant with ISO-KF/CF standards |
| Custom Gasket | CVD / Etch / PVD equipment | FFKM / PTFE / PFA | Customizable according to the image |
Typical application scenarios
Wafer Handling Systems
Vacuum Chamber / Valve Systems
Etching / CVD / ALD
Lithography / Cleaning Systems
Metrology & Inspection Systems